Application of modified couple stress theory to study dynamic characteristics of electrostatically actuated micro-beams resting upon squeeze-film damping under mechanical shock
نویسنده
چکیده
In this paper, the dynamic characteristics of clamped-clamped silicon microbeam subjected to electrostatic excitation and mechanical shock is investigated. The Euler-Bernoulli beam model based on the modified couple stress theory with von Kármán geometric non-linearity is utilized in theoretical formulation. Afterwards, squeeze-film damping effects of microstructures for small amplitude vibration are analyzed through Reynolds equation. In this regard, the generalized differential quadrature method is used to solve dimensionless governing equations of micro-beam numerically. Overall, it is shown that the pull-in phenomena in electrically actuated MEMS is size dependent. There are also a relation between pull-in voltage and dimensionless mid-point deflection.
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